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Proceedings Paper

Capacitive pressure sensor for MEMS
Author(s): Amita Gupta; Amir Ahmad; Ranvir Singh
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Paper Abstract

Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control. A capacitive type of pressure sensor has been made using bulk silicon micromachining. It converts the diaphragm deformation, corresponding to pressure, into a change of capacitance. The total change in capacitance is the integral of the change of capacitance of each small area on the diaphragm. The change of capacitance δC/C is measured as a function of deformation or pressure. The diaphragm deflection has been modelled using Intellisuite sofware.

Paper Details

Date Published: 14 October 2003
PDF: 5 pages
Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514570
Show Author Affiliations
Amita Gupta, Solid State Physics Lab. (India)
Amir Ahmad, Solid State Physics Lab. (India)
Ranvir Singh, Solid State Physics Lab. (India)


Published in SPIE Proceedings Vol. 5062:
Smart Materials, Structures, and Systems
S. Mohan; B. Dattaguru; S. Gopalakrishnan, Editor(s)

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