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Proceedings Paper

Use of online spectrophotometric data for the characterisation of VUV coatings
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Paper Abstract

The optical behavior of multilayer coatings for the VUV region is determined by dispersion and absorption of the used materials, non-ideal interfaces between layers and thickness of each component layer. Therefore, an accurate characterization of a multilayer stack encounters the inherent difficulties related to dealing with a high number of defining parameters. The use of on-line data (data acquired during the deposition process) allows a more precise characterization of the coatings, in comparison with the use of standard spectrophotometric measurements obtained after the deposition of the layers. Here we present the results of the characterization of a high reflecting coating where the component materials are fluorides (LaF3 and MgF2). Several models with an increasing degree of complexity and assuming different multilayer growing concepts have been applied for the description of the analyzed sample.

Paper Details

Date Published: 25 February 2004
PDF: 8 pages
Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); doi: 10.1117/12.514418
Show Author Affiliations
Jordi Sancho-Parramon, Univ. de Barcelona (Spain)
Salvador Bosch, Univ. de Barcelona (Spain)
Josep Ferre-Borrull, Univ. de Barcelona (Spain)
Stefan Guenster, Laser Zentrum Hannover e.V. (Germany)
Detlev Ristau, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 5250:
Advances in Optical Thin Films
Claude Amra; Norbert Kaiser; H. Angus Macleod, Editor(s)

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