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Proceedings Paper

System test for high-NA objectives at the 157-nm wavelength
Author(s): Horst Schreiber
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Paper Abstract

Focusing on small features for optical inspection or defect repair, shorter wavelengths are used to increase resolution and energy density. Objectives designed for 157 nm using calcium fluoride are optimized and evaluated interferometrically at the wavelength of use to include all actinic effects. An image evaluation set-up is presented using a custom illuminator to image 130nm features, enlarged 500 times, onto a back-thinned CCD camera in real time.

Paper Details

Date Published: 26 February 2004
PDF: 10 pages
Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); doi: 10.1117/12.513480
Show Author Affiliations
Horst Schreiber, Corning Inc. (United States)

Published in SPIE Proceedings Vol. 5252:
Optical Fabrication, Testing, and Metrology
Roland Geyl; David Rimmer; Lingli Wang, Editor(s)

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