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Proceedings Paper

Precision soft x-ray reflectometry of curved multilayer optics
Author(s): Michael K. Krumrey; Mikhael Kuehne; Peter Mueller; Frank Scholze
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Paper Abstract

In the PTB laboratory at the electron storage ring BESSY flat multilayer mirrors as well as curved multilayer optics are characterized in the soft x-ray region using synchrotron radiation. Precision reflectometry is performed in the spectral range between 5 and 30 nm where the content of higher orders in the monochromatized radiation is below 2%. The existing facilities and current improvements of the instrumentation are described. Examples for spatially resolved measurements of the reflectance of curved multilayer optics are presented.

Paper Details

Date Published: 1 January 1992
PDF: 8 pages
Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); doi: 10.1117/12.51276
Show Author Affiliations
Michael K. Krumrey, Physikalisch-Technische Bundesanstalt Berlin (Germany)
Mikhael Kuehne, Physikalisch-Technische Bundesanstalt Berlin (Germany)
Peter Mueller, Physikalisch-Technische Bundesanstalt Berlin (Germany)
Frank Scholze, Physikalisch-Technische Bundesanstalt Berlin (Germany)


Published in SPIE Proceedings Vol. 1547:
Multilayer Optics for Advanced X-Ray Applications
Natale M. Ceglio, Editor(s)

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