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Proceedings Paper

Multilayer coatings on figured optics
Author(s): Stephen P. Vernon; Daniel Gorman Stearns; Robert S. Rosen; Natale M. Ceglio; David P. Gaines; Michael K. Krumrey; Peter Mueller
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Paper Abstract

Soft x-ray projection lithography (SXPL) requires uniform, high reflectivity multilayer (ML) coatings on figured optical surfaces with lens speeds (f) between 3 and 6 and diameters of 10 to 15 cm. High reflectivity Mo-Si ML coatings for operation near 13 nm were deposited on f 3.4 and f 6 optics 5 and 7.5 cm in diameter using planar dc magnetron sputtering. Measurements of the normal incidence reflectivity (NIR) of 63% at 13 nm uniform over the central 5 cm of the figured surface were obtained. Comparison of the measured values to model calculations of the wavelength dependent reflectivity indicate that the ML period is uniform to better than 0.04 nm over this region.

Paper Details

Date Published: 1 January 1992
PDF: 8 pages
Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); doi: 10.1117/12.51268
Show Author Affiliations
Stephen P. Vernon, Vernon Applied Physics (United States)
Daniel Gorman Stearns, Lawrence Livermore National Lab. (United States)
Robert S. Rosen, Lawrence Livermore National Lab. (United States)
Natale M. Ceglio, Lawrence Livermore National Lab. (United States)
David P. Gaines, Lawrence Livermore National Lab. (United States)
Michael K. Krumrey, Physikalisch-Technische Bundesanstalt Berlin (Germany)
Peter Mueller, Physikalisch-Technische Bundesanstalt Berlin (Germany)

Published in SPIE Proceedings Vol. 1547:
Multilayer Optics for Advanced X-Ray Applications
Natale M. Ceglio, Editor(s)

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