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Layered SAW nitrogen dioxide sensor with WO3 selective layer
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Paper Abstract

A multi-layered surface acoustic wave (SAW) transducer employing an R.F. magnetron sputtered tungsten trioxide (WO3) thin film as a selective layer, for low concentration nitrogen dioxide (NO2) gas sensing is presented. The layered SAW device structure is fabricated on a 36° Y-cut, X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The dominant mode of acoustic propagation in the sensor is a combination of mainly a shear and a longitudinal displacement types. Such a structure has the advantage of confining the acoustic wave energy to the surface of the device, which increases the sensitivity of the system. A frequency shift of 30 kHz is shown for a concentration of 500ppb of NO2 in synthetic air, highlighting the possibility of such a sensor being targeted towards the sub-ppb levels of NO2.

Paper Details

Date Published: 24 April 2003
PDF: 8 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.512086
Show Author Affiliations
Samuel James Ippolito, RMIT Univ. (Australia)
CRC for microTechnology (Australia)
Kourosh Kalantar-zadeh, RMIT Univ. (Australia)
CRC for microTechnology (Australia)
Adrian Trinchi, RMIT Univ. (Australia)
CRC for microTechnology (Australia)
David A. Powell, RMIT Univ. (Australia)
CRC for microTechnology (Australia)
Wojtek Wlodarski, RMIT Univ. (Australia)
CRC for microTechnology (Australia)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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