The intensity correlation function of' the light scattered by the diffuse object under fully developed speckle pattern illumination has been theoretically and experimentally investigated. The scattered light is called a doubly scattered light. When the patially coherent light illuminates the diffuse object over enough wider region than the coherence area, the doubly scattered light obeys Gaussian statistics. Then the surface roughness o the diffuse object does not depend on the speckle contrast of the doubly scattered light, but depends on the speckle size (decay rate of the intensity correlation function). From these properties, two roughness parameters of the object have been determined.

Date Published: 1 January 1991
PDF: 8 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51134

Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)