The new Zeiss interferometer works with a complex software package which can be run in two different modes : a "workshop mode" for simple pushbutton operation of standard measurement sequences, and a "master mode" well suited for the use in the laboratory with changing requirements for measurement and evaluation methods. Macros of arbitrary functional sequences can be created in the master mode and associated with function keys for the workshop mode. A description of the implemented features concerning data acquisition and display, control of the instrument as well as data evaluation and manipulation is given.

Date Published: 1 January 1991
PDF: 9 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51117

Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)