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Proceedings Paper

Super-accurate positioning technique using diffracted moire signals
Author(s): Yutaka Takada; Yoshiyuki Uchida; Yasuo Akao; Jun Yamada; Shuzo Hattori
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Paper Abstract

This paper deals with an autoiatic and precision alignient technique for proxiiity printing in x-ray lithography, using two pairs of iioire gratings, with moire signals from each pair being 180 out of phase with each other. The automatic and precision alignment experimental system which was constructed can measure both transmission moire signals and reflection moire signals at the same time. The automatic alignment was achieved using diffracted moire signals in transmission and also in reflection as control signals for a stage driver. The alignient position of the system was monitored by the difference signal in non-control signals. The drift characteristics of the alignment position were measured by operating voltage gain and/or offset voltage value of preamplifiers in the system. We concluded that the technique using diffracted moire signals is a usable automatic and precision alignment technique and the technique could be applied to one of the variable positioning techniques.

Paper Details

Date Published: 1 January 1991
PDF: 6 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51107
Show Author Affiliations
Yutaka Takada, Aichi Institute of Technology (Japan)
Yoshiyuki Uchida, Aichi Institute of Technology (Japan)
Yasuo Akao, Aichi Institute of Technology (Japan)
Jun Yamada, Aichi Institute of Technology (Japan)
Shuzo Hattori, Nagoya Industrial Science Research Institute (Japan)

Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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