
Proceedings Paper
Surface microtopography of thin silver filmsFormat | Member Price | Non-Member Price |
---|---|---|
$17.00 | $21.00 |
Paper Abstract
The authors present ne applications for the recently developed nori-contact
optical inicrotopographer emphasizing the results of topographic inspections of thin
silver films edges. These films were produced by sputtering of silver through
different masks, using a planar magnetron source. The results show the influence ot
the thickness and position of the masks on the topography of the film near its edge.
Topographic information is obtained from the horizontal shift incurred by the
bright spot on an horizontal surface, which is displaced vertically, when this is
illuminated by an oblique collimated laser beam.
The laser beam is focused onto the surface into a diffraction limited spot and
is made to sweep the surface to be examined.. The horizontal position of the bright
spot is continuously imaged onto a light detector array and the information about
individual detectors that are activated is used to compute the corresponding
horizontal shift on the reference plane. Simple trignometric calculations are used
to relate the horizontal shift to the distance between the surface and a reference
plane at each sampling point and thus a map of the surface topography can be built.
Paper Details
Date Published: 1 January 1991
PDF: 8 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51104
Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)
PDF: 8 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51104
Show Author Affiliations
Manuel Filipe M. Costa, Univ. do Minho (Portugal)
Jose B. Almeida, Univ. do Minho (Portugal)
Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)
© SPIE. Terms of Use
