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Proceedings Paper

Two-dimensional micropattern measurement using precision laser beam scanning
Author(s): Hiroo Fujita
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Paper Abstract

A novel image scanning technique, the pulse counting method, has been developed for geometric parameter measurement of optical fibers. The theory and implement of this technique are described. Experimental results show that the resolution and the repeatability of the system with this technique are O.OO5pm and O.lpm (3a) , respectively. Indexing Words: Image Scanning; Geometric Measurement; Optical Fibers;

Paper Details

Date Published: 1 January 1991
PDF: 12 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51094
Show Author Affiliations
Hiroo Fujita, Citizen Watch Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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