
Proceedings Paper
Holographic measurement of the angular error of a table moving along a slidewayFormat | Member Price | Non-Member Price |
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Paper Abstract
An optical method for the precise measurement of the angular errors of a table
moving along a slideway is described. The system is arranged so that angular errors
of the table give rise to sideways shifts of a random wavefront generated by a
ground glass screen. The shifted wavefront is made to interfere with a
reconstruction of the original unshifted wavefront produced by a hologram, and the
angular errors determined from the interference fringes which appear. This technique
has several advantages over usual autocollimator methods.
Paper Details
Date Published: 1 January 1991
PDF: 6 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51073
Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)
PDF: 6 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51073
Show Author Affiliations
Kiyofumi Matsuda, Mechanical Engineering Lab. (Australia)
Koji Tenjimbayashi, Mechanical Engineering Lab. (Japan)
Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)
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