Proceedings Paper
Interferometer for testing aspheric surfaces with electron-beam computer-generated holograms| Format | Member Price | Non-Member Price |
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Paper Abstract
This paper describes an interferometer system for testing aspheric surfaces
with computer-generated holograms (CGHs). A CGH written by electron-beams
achieves the precise testing of a wide range of aspheric surfaces. A new
algorithm removes the error caused by misalignment of a CGH and a testing
surface. This system can test aspheric surfaces with accuracy 2/10 (P-V value)
and repeatability /5OO (RMS value).
Paper Details
Date Published: 1 January 1991
PDF: 8 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51053
Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)
PDF: 8 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51053
Show Author Affiliations
Takashi Gemma, Topcon Corp. (Japan)
Masayuki Hideshima, Topcon Corp. (Japan)
Masayuki Hideshima, Topcon Corp. (Japan)
Makoto Taya, Topcon Corp. (Japan)
Nobuko Watanabe, Topcon Corp. (Japan)
Nobuko Watanabe, Topcon Corp. (Japan)
Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)
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