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Proceedings Paper

Real-time wavefront measurement with lambda/10 fringe spacing for the optical shop
Author(s): Klaus R. Freischlad; Michael F. Kuechel; Karl-Heinz Schuster; Ulrich Wegmann; Winfried M. Kaiser
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Paper Abstract

We will report on a new interferometer developed at Carl Zeiss, which has real-time measuring capability with instant visualization of results, is nearly insensitive to vibrations, has a variable fringe spacing from one lambda to lambda/1O (lambda represents the wavelength of the light used in the interferometric test), and can give lambda/100 accuracy through a simple calibration procedure. It can be handled with the same ease and in just the same way as conventional interferometers.

Paper Details

Date Published: 1 January 1991
PDF: 7 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51047
Show Author Affiliations
Klaus R. Freischlad, Carl Zeiss (United States)
Michael F. Kuechel, Carl Zeiss (Germany)
Karl-Heinz Schuster, Carl Zeiss (Germany)
Ulrich Wegmann, Carl Zeiss (Germany)
Winfried M. Kaiser, Carl Zeiss (Germany)

Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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