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Proceedings Paper

High-precision interferometric testing of spherical mirrors with long radius of curvature
Author(s): Klaus R. Freischlad; Michael F. Kuechel; Wolfgang Wiedmann; Winfried M. Kaiser; Maximilian Mayer
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Paper Abstract

Surface deviations of spherical mirrors from a best fitting, mathematically ideal sphere were measured to an absolute precision of 0.25 nm rms. Because of the long radius of curvature, a Hindle-type arrangement was used as interferometric setup, resulting in a test arm length of about 1.4 m. A special calibration procedure was implemented to eliminate systematic, setup-dependent errors. A very fast data acquisition technique was combined with real-time wavefront averaging to eliminate the effects of random errors, such as wavefront variations due to the turbulent atmosphere in the beam path. For the evaluation of one mirror surface, all in all 400,000 individual wavefront measurements at 400 x 400 points were combined, requiring an overall measurement time of only one to two days.

Paper Details

Date Published: 1 January 1991
PDF: 10 pages
Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51046
Show Author Affiliations
Klaus R. Freischlad, Carl Zeiss (United States)
Michael F. Kuechel, Carl Zeiss (Germany)
Wolfgang Wiedmann, Carl Zeiss (Germany)
Winfried M. Kaiser, Carl Zeiss (Germany)
Maximilian Mayer, Carl Zeiss (Germany)

Published in SPIE Proceedings Vol. 1332:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection
Chander Prakash Grover, Editor(s)

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