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Proceedings Paper

Study on readout of super-resolution pits with Si thin films
Author(s): Jingsong Wei; Hao Ruan; Fuxi Gan
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Paper Abstract

By using Si thin film to replace the Al reflective layer in conventional ROM, the recording pits with a diameter of 380 nm and a depth of 50 nm are read out on the dynamic measuring equipment with a laser wavelength λ of 632.8 nm and a NA of 0.40. In the course of reproduction, the readout power is optimized, and the velocity is 5 m/s. The optimum Si thin film thickness is 25 nm and the CNR is 35 dB.

Paper Details

Date Published: 9 April 2003
PDF: 4 pages
Proc. SPIE 5060, Sixth International Symposium on Optical Storage (ISOS 2002), (9 April 2003); doi: 10.1117/12.510309
Show Author Affiliations
Jingsong Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Hao Ruan, Shanghai Institute of Optics and Fine Mechanics (China)
Fuxi Gan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 5060:
Sixth International Symposium on Optical Storage (ISOS 2002)
Fuxi Gan; Zuoyi Li, Editor(s)

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