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Proceedings Paper

Thermal measurement and analysis of micro devices using thermography
Author(s): Y. Q. Gu; Ronghai Zhang; Dezhong Zhu
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Paper Abstract

Sensors and actuators become much smaller as parts of MEMS devices. Some of them run based on the thermal principle and thermal characteristics directly determine their performance. For example, micro-hotplate structures are incorporated into integrated gas sensors to heat the sensing thin film to a determinate temperature with a high sensitivity. The micro-machined accelerometer with no proof mass is based on free convection of a tiny hot air bubble in an enclosed chamber. The temperature profile of its heater is a key factor influencing the feature of the accelerometer. A thermally actuated membrane micro-pumpo can drive fluid by periodical heating of materials with different thermal expansion coefficients and consequent periodical vibration. An IR thermography with a microscopic set was applied in their thermal measurement to optimize these devices.

Paper Details

Date Published: 29 April 2003
PDF: 9 pages
Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); doi: 10.1117/12.509876
Show Author Affiliations
Y. Q. Gu, Tsinghua Univ. (China)
Ronghai Zhang, Tsinghua Univ. (China)
Dezhong Zhu, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 5058:
Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002
Gong Xin Shen; Soyoung S. Cha; Fu-Pen Chiang; Carolyn R. Mercer, Editor(s)

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