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Proceedings Paper

Three dimensional moire interferometer
Author(s): Fulong Dai; HaiXia Shang; Chao Li; Huimin Xie
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Paper Abstract

A new moire interferometer, known as multifunction 3D function interferometry system is developed by authors, which combines the advantages of four-beam moire interferometer with the Twyman/Green interference system. The system can measure in-plane and out-of-plane deformation synchronously with high accuracy and high sensitivity. A compact phase shifter is used to improve the measurement sensitivity. The optical theory, components, key techniques, unique ability, and specifications of the system are described in detail in this paper. Some typical experiments using this system have been done and gained good results.

Paper Details

Date Published: 29 April 2003
PDF: 7 pages
Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); doi: 10.1117/12.509787
Show Author Affiliations
Fulong Dai, Tsinghua Univ. (China)
HaiXia Shang, Tsinghua Univ. (China)
Chao Li, Tsinghua Univ. (China)
Huimin Xie, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 5058:
Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002
Gong Xin Shen; Soyoung S. Cha; Fu-Pen Chiang; Carolyn R. Mercer, Editor(s)

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