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Proceedings Paper

Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets
Author(s): Takeshi Higashiguchi; Takahiro Hirata; Masato Koga; Chirag Rajyaguru; Wataru Sasaki; Shoichi Kubodera
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Paper Abstract

Characteristics of extreme ultraviolet (EUV) light at the wavelength between 5 to 20 nm from rare gas cryogenic targets irradiated with a nano-second laser pulse are studied. Spatial distribution of the EUV light and the ion current was measured and found to vary as cos2θ and cos6θ, respectively, where θ is an angle to the target normal. Energetic ions were detected, which had a velocity of the order of 106 cm/s. According to the observed cos2θ spatial distribution, the spatially-integrated total EUV output energy for the xenon cryogenic target was evaluated to be 1.5 mJ/pulse, leading to the conversion efficiency of 0.2%/pulse.

Paper Details

Date Published: 7 January 2004
PDF: 11 pages
Proc. SPIE 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, (7 January 2004); doi: 10.1117/12.509448
Show Author Affiliations
Takeshi Higashiguchi, Miyazaki Univ. (Japan)
Takahiro Hirata, Miyazaki Univ. (Japan)
Masato Koga, Miyazaki Univ. (Japan)
Chirag Rajyaguru, Miyazaki Univ. (Japan)
Wataru Sasaki, Miyazaki Univ. (Japan)
Nano-Tech Photon, Inc. (Japan)
Shoichi Kubodera, Miyazaki Univ. (Japan)

Published in SPIE Proceedings Vol. 5196:
Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications
George A. Kyrala; Jean-Claude J. Gauthier; Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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