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Proceedings Paper

Applications and potential of the mask structured ion exchange technique (MSI) in micro-optics
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Paper Abstract

The mask structured silver sodium ion exchange in glass (MSI) is a powerful tool for the realization of high precision refractive micro optical GRIN components. Commonly the distribution of the silver ions in GRIN elements and thus the index distribution is determined by the laws of thermal diffusion. By the use of a structured metal mask, which defines the areas of contact between the glass and the silver salt melt, an additional degree of freedom in optical design is introduced. A photolithographic pattern generator provides the accuracy of the mask structure to realize wave front optimized micro lens arrays with 100% filling factor in Cartesian, hexagonal and also in nearly any other arbitrary geometrical arrangements for several applications such as high precision Shack-Hartmann systems. In this paper we want to discuss the potential and limits of this technique. We report on the family of optical functions, which can be realized with MSI. Furthermore we give an overview over the actual applications.

Paper Details

Date Published: 10 November 2003
PDF: 12 pages
Proc. SPIE 5177, Gradient Index, Miniature, and Diffractive Optical Systems III, (10 November 2003); doi: 10.1117/12.508781
Show Author Affiliations
Jochen Baehr, Smart Micro-Optical Solutions GmbH (Germany)
Karl-Heinz Brenner, Univ. Mannheim (Germany)

Published in SPIE Proceedings Vol. 5177:
Gradient Index, Miniature, and Diffractive Optical Systems III
Thomas J. Suleski, Editor(s)

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