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Proceedings Paper

HRTEM analysis of Pt/C multilayers
Author(s): Naoyuki Ohnishi; Yuji Nonomura; Yasushi Ogasaka; Yuzuru Tawara; Yoshiharu Namba; Kojun Yamashita
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Paper Abstract

High-resolution transmission electron microscopy (HRTEM) studies were performed on Pt/C multilayers fabricated for x-ray mirror optics. The multilayers with d-spacing of about 4 nm were deposited either by dc-magnetron sputtering or by ion-beam sputtering on commercially available Si wafer substrates. Atomic resolution TEM observations and selected area electron diffraction (SAED) of cross-sections of multilayers were made by using several TEM apparatus including an ultra-high-voltage TEM with theoretical point resolution of 0.10 nm. The HRTEM and SAED studies showed that the multilayer consisted of amorphous C layers and polycrystalline Pt layers having a texture with the Pt <111> axes oriented normal to the interface. The Pt grain size perpendicular to the layers was of about the layer thickness, while the grain size along the layers varied in a range up to 10 nm. Detailed analysis of the HRTEM images indicated that the interface of the multilayer was basically defined as surface of the Pt crystal grains, and the interface roughness originated in an arrangement of the grains. Interface broadening observed in the image was primarily attributed to the averaging of the roughness due to Pt grains.

Paper Details

Date Published: 29 January 2004
PDF: 10 pages
Proc. SPIE 5168, Optics for EUV, X-Ray, and Gamma-Ray Astronomy, (29 January 2004); doi: 10.1117/12.508632
Show Author Affiliations
Naoyuki Ohnishi, Chubu Univ. (Japan)
Yuji Nonomura, Chubu Univ. (Japan)
Yasushi Ogasaka, Nagoya Univ. (Japan)
Yuzuru Tawara, Nagoya Univ. (Japan)
Yoshiharu Namba, Chubu Univ. (Japan)
Kojun Yamashita, Nagoya Univ. (Japan)

Published in SPIE Proceedings Vol. 5168:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy
Oberto Citterio; Stephen L. O'Dell, Editor(s)

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