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Proceedings Paper

Indentation hardness and modulus of the surface of a large superpolished single-crystal silicon sphere
Author(s): Achim J. Leistner; Anthony C. Fischer-Cripps; Jean M. Bennett
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Paper Abstract

Surface properties of single crystal silicon are of great interest to many people in research and development as well as in industry, particularly the semiconductor industry. In this paper we present and discuss the results of a series of nanoindentations as they relate to the elasticity and microhardness properties on the surface of a large single crystal silicon sphere. The sphere is 94 mm, it has a total roundness error of <213 nm P-V, and a super-polished surface <0.4 nm rms. The cubic structure of a silicon crystal displays different properties of hardness and elasticity in the different crystallographic planes. We present a study of the measurable differences in these mechanical properties as they relate to the <111> and the <100> directions. We show how these differences affect the overall shape of the sphere during the surface finishing process.

Paper Details

Date Published: 12 December 2003
PDF: 8 pages
Proc. SPIE 5179, Optical Materials and Structures Technologies, (12 December 2003); doi: 10.1117/12.507234
Show Author Affiliations
Achim J. Leistner, CSIRO (Australia)
Anthony C. Fischer-Cripps, CSIRO (Australia)
Jean M. Bennett, Naval Air Warfare Ctr. (United States)

Published in SPIE Proceedings Vol. 5179:
Optical Materials and Structures Technologies
William A. Goodman, Editor(s)

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