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Proceedings Paper

Optical waveguides in polymer materials by ion implantation
Author(s): Werner F. Frank; Juergen R. Kulisch; Hilmar Franke; Dorothee M. Rueck; Stefan Brunner; Roger A. Lessard
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Paper Abstract

Poly-(methyl-methacrylate) (PMMA) on different substrates was implanted by He+ ions of energies between 50 keV and 250 keV as well as 1 MeV and 2 MeV. The ion doses varied between 1012/cm2 and 1015/cm2. We have studied the increase of the refractive index in the implanted surface layer, which acts as an optical waveguide, by measuring the effective index of refraction neff for different optical modes. According to the range of ions in the polymer, surface waveguides and buried waveguides can be generated. The number of modes a waveguide is carrying depends on the ion doses. For single mode waveguides low doses must be used. Waveguides with losses below 1 dB/cm were obtained. The chemical effects caused by the implantation are measured by IR spectroscopy and residual gas analysis (RGA), physical modifications of the surface were studied by scanning electron microscopy (SEM). The refractive index profiles are discussed using simulation calculations.

Paper Details

Date Published: 1 December 1991
PDF: 10 pages
Proc. SPIE 1559, Photopolymer Device Physics, Chemistry, and Applications II, (1 December 1991); doi: 10.1117/12.50684
Show Author Affiliations
Werner F. Frank, Forschungsinstitut der Deutschen Bundespost Telekom (Germany)
Juergen R. Kulisch, Univ. Duisburg-Gesamthochschule (Germany)
Hilmar Franke, Univ. Duisburg-Gesamthochschule (Germany)
Dorothee M. Rueck, Gesellschaft fuer Schwerionenforschung (Germany)
Stefan Brunner, Gesellschaft fuer Schwerionenforschung (Germany)
Roger A. Lessard, Ctr. d'Optique, Photonique, et Laser/Univ. Laval (Canada)

Published in SPIE Proceedings Vol. 1559:
Photopolymer Device Physics, Chemistry, and Applications II
Roger A. Lessard, Editor(s)

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