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Proceedings Paper

Grain decoration in aluminum oxynitride (ALON) from polishing on bound abrasive laps
Author(s): Leslie L. Gregg; Anne E. Marino; Jennifer C. Hayes; Stephen D. Jacobs
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Paper Abstract

Aluminum oxynitride (ALON) is a polycrystalline material that has proven difficult to polish due to its grain structure. Bound abrasives are an effective means for polishing ALON, and work is being done with them to obtain good surfaces, with reasonable removal rates. Laps consisting of abrasives bound in epoxy matrices were created for polishing ALON. The effects of varying abrasive type, abrasive concentration, lap shape, coolant and load were studied. Metrology procedures were developed to monitor different aspects of the grain structure and numerically evaluate grain boundary decoration. Strategies were developed to polish ALON at acceptable rates with reasonably good surface quality. Work is directed toward finding optimal bound abrasive lap formulations that can be fabricated into ring and/or contour tools for testing on CNC machining platforms.

Paper Details

Date Published: 22 December 2003
PDF: 8 pages
Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.506849
Show Author Affiliations
Leslie L. Gregg, Univ. of Rochester (United States)
Anne E. Marino, Univ. of Rochester (United States)
Jennifer C. Hayes, Univ. of Rochester (United States)
Stephen D. Jacobs, Univ. of Rochester (United States)

Published in SPIE Proceedings Vol. 5180:
Optical Manufacturing and Testing V
H. Philip Stahl, Editor(s)

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