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Proceedings Paper

Mass-producible optical guided-wave devices fabricated by photopolymerization
Author(s): Hayami Hosokawa; Noriyoshi Horie; Tsukasa Yamashita
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Paper Abstract

Mass-producible optical waveguide devices and their fabrication method for integrated optics are described. Single-mode polymer rib waveguides and grating couplers in planar polymer waveguides which are a key component for organic integrated optical devices have been successfully developed by using photopolymerization (2P) method. The method is based on an electron-beam lithography technique for writing original patterns and a replicating technique using a molding stamper.

Paper Details

Date Published: 1 December 1991
PDF: 9 pages
Proc. SPIE 1559, Photopolymer Device Physics, Chemistry, and Applications II, (1 December 1991); doi: 10.1117/12.50673
Show Author Affiliations
Hayami Hosokawa, Omron Corp. (Japan)
Noriyoshi Horie, Omron Corp. (Japan)
Tsukasa Yamashita, Omron Corp. (Japan)

Published in SPIE Proceedings Vol. 1559:
Photopolymer Device Physics, Chemistry, and Applications II
Roger A. Lessard, Editor(s)

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