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Proceedings Paper

Precise in-situ transmission measurement system at 157 nm
Author(s): Seiji Takeuchi; Yasuhiro Kishikawa; Minoru Yoshii; Akiyoshi Suzuki
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Paper Abstract

Precise in-situ transmission testing is necessary for evaluation of materials to be used in lithography systems, which use light source at the wavelength of 157 nm. Fluorine (F2) excimer lasers have pulse-to-pulse energy variation (< 9 %, 3 sigma, from manufacturer's specification), and pulse energy monitoring is required for precise evaluation. Due to the uncontrolled fluctuations of the polarization and high pulse energy of the laser, it is difficult to monitor the laser pulse energy and to achieve precision measurement. We have built a precise in-situ transmittance measurement system, employing polarization insensitive beam splitters for precision pulse energy monitoring. The beam splitter consists of three parallel plates. This scheme eliminates the effects of polarization fluctuation and decreases the energy to the detector. We have obtained 0.1 % (3 sigma) stability in our transmission measurement using this assembly.

Paper Details

Date Published: 14 November 2003
PDF: 8 pages
Proc. SPIE 5192, Optical Diagnostic Methods for Inorganic Materials III, (14 November 2003); doi: 10.1117/12.506614
Show Author Affiliations
Seiji Takeuchi, Canon, Inc. (Japan)
Yasuhiro Kishikawa, Canon, Inc. (Japan)
Minoru Yoshii, Canon, Inc. (Japan)
Akiyoshi Suzuki, Canon, Inc. (Japan)

Published in SPIE Proceedings Vol. 5192:
Optical Diagnostic Methods for Inorganic Materials III
Leonard M. Hanssen, Editor(s)

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