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Proceedings Paper

Determination of thin-film roughness and volume structure parameters from light-scattering investigations
Author(s): Angela Duparre; Samer Kassam
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Paper Abstract

Light scattering measurements can be used for determining roughness as well as volume structure parameters of optical thin films. A method of structural analysis is outlined, which allows a quantitative estimation of roughness parameters, mean columnar diameter, packing density, and the evolutionary exponent, respectively.

Paper Details

Date Published: 1 December 1991
PDF: 4 pages
Proc. SPIE 1530, Optical Scatter: Applications, Measurement, and Theory, (1 December 1991); doi: 10.1117/12.50526
Show Author Affiliations
Angela Duparre, Friedrich Schiller Univ. Jena (Germany)
Samer Kassam, Friedrich Schiller Univ. Jena (Germany)

Published in SPIE Proceedings Vol. 1530:
Optical Scatter: Applications, Measurement, and Theory
John C. Stover, Editor(s)

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