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Proceedings Paper

Designing nanostructures by glancing angle deposition
Author(s): Yiping Zhao; Dexian Ye; Gwo-Ching Wang; Toh-Ming Lu
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Paper Abstract

Three-dimensional nanostructures can be fabricated by the glancing angle deposition technique. By rotating the substrate in both polar and azimuthal directions, one can fabricate desired nanostructures, such as nano-rod arrays with different shapes, nano-spring arrays, and even multilayer nanostructures. This method offers a fully three-dimensional control of the nanostructure with additional capability of self-alignment. There is almost no limitation on materials that can be fabricated into desired nanostructures. In this presentation, we will discuss the current status of the glancing angle deposition technology, its potential applications, and its future challenges.

Paper Details

Date Published: 27 October 2003
PDF: 15 pages
Proc. SPIE 5219, Nanotubes and Nanowires, (27 October 2003); doi: 10.1117/12.505253
Show Author Affiliations
Yiping Zhao, Univ. of Georgia (United States)
Dexian Ye, Rensselaer Polytechnic Institute (United States)
Gwo-Ching Wang, Rensselaer Polytechnic Institute (United States)
Toh-Ming Lu, Rensselaer Polytechnic Institute (United States)

Published in SPIE Proceedings Vol. 5219:
Nanotubes and Nanowires
Akhlesh Lakhtakia; Sergey Maksimenko, Editor(s)

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