Share Email Print

Proceedings Paper

Optimizing an EUV source for 13.5 nm
Author(s): Gerry D O'Sullivan; Anthony Cummings; Grainne Duffy; Padraig A Dunne; Andrew Fitzpatrick; Paddy Hayden; Luke McKinney; Nicola Murphy; Dave O'Reilly; Emma J Sokell; John White
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The emission spectra of laser produced plasmas of pure tin targets are dominated by recombination continuum emission throughout the entire EUV spectral region with intense structure due to line emission dominating the spectra in the 13 - 14 nm region. This feature arises from resonant 4p64dn - 4p54dn+1 + 4p64dn-14f emission lines that are generally concentrated in a narrow band, 5 - 10 eV wide, which overlaps considerably in adjacent ion stages to form an intense unresolved transition array (UTA). Such plasmas are optically thick; the strongest lines are attenuated and frequently appear in absorption. However, if tin comprises a few percent of a predominantly low-Z matrix, the recombination is suppressed and the plasmas can become optically thin to resonance radiation. Under these conditions, resonance line emission can dominate the spectra. The application of a collisional radiative (CR) model, combined with ab initio atomic structure calculations, allows one to estimate the laser plasma parameters that will optimize the UTA as efficient narrow bandwidth emitters of EUV radiation. The dependence on laser power density of both in-band emission and debris generation from pure tin targets is presented. The influence of a pre-pulse on the plasma output is also investigated.

Paper Details

Date Published: 7 January 2004
PDF: 9 pages
Proc. SPIE 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, (7 January 2004); doi: 10.1117/12.504715
Show Author Affiliations
Gerry D O'Sullivan, Univ. College Dublin (Ireland)
Anthony Cummings, Univ. College Dublin (Ireland)
Grainne Duffy, Univ. College Dublin (Ireland)
Padraig A Dunne, Univ. College Dublin (Ireland)
Andrew Fitzpatrick, Univ. College Dublin (Ireland)
Paddy Hayden, Univ. College Dublin (Ireland)
Luke McKinney, Univ. College Dublin (Ireland)
Nicola Murphy, Univ. College Dublin (Ireland)
Dave O'Reilly, Univ. College Dublin (Ireland)
Emma J Sokell, Univ. College Dublin (Ireland)
John White, Univ. College Dublin (Ireland)

Published in SPIE Proceedings Vol. 5196:
Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications
George A. Kyrala; Jean-Claude J. Gauthier; Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

© SPIE. Terms of Use
Back to Top