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Proceedings Paper

Molecular dynamics analysis of picosecond pulse laser ablation
Author(s): Etsuji Ohmura; Ichirou Fukumoto; Isamu Miyamoto
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Paper Abstract

Laser ablation process of aluminum with the fourth harmonics of Nd:YAG laser is simulated, using the modified molecular dynamics method, which has been developed by Ohmura and Fukumoto. It has been clarified in the previous studies that there are two types in laser ablation process. One is explosive ablation and the other is calm ablation. In this paper, the ablation processes of these two types were visualized first by classifying the ablated atoms by the start time of scatter. It was cleared that the transition of kinetic and potential energies of ablated atoms and the energy ratio used for ablation to the absorbed energy depend on these ablation types. It was also verified that the transition of the number of ablated atoms and lumps of atoms also depend on the ablation types.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.501914
Show Author Affiliations
Etsuji Ohmura, Osaka Univ. (Japan)
Ichirou Fukumoto, Japan Atomic Energy Research Institute (Japan)
Isamu Miyamoto, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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