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Proceedings Paper

Novel method of fabrication of diffractive mocrolens arrays
Author(s): Sihai Chen; Xinjian Yi; Hong Ma; Guang Huang; Hongchen Wang; Tao Xiong; Xiong Li; Xiongwei Li
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Paper Abstract

A new method, self-alignment process is introduced to fabricate microlens arrays. By this method, during fabrication process, the rigorous alignment, which has great effect on diffraction efficiency in the conventional multi-photolithography process, is avoided. The large arrays of 1500 × 640 element silica microlens with 8-phase-level are manufactured by this method. The measurement results show that the 8-phase-level microlens arrays diffraction efficiency is as high as 93%, which is higher than by the conventional method.

Paper Details

Date Published: 17 January 2003
PDF: 8 pages
Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); doi: 10.1117/12.501841
Show Author Affiliations
Sihai Chen, Huazhong Univ. of Science and Technology (China)
Xinjian Yi, State Key Lab. for Laser Technology (China)
Hong Ma, Huazhong Univ. of Science and Technology (China)
Guang Huang, Huazhong Univ. of Science and Technology (China)
Hongchen Wang, State Key Lab. for Pattern Recognition and Intelligence Control (China)
Tao Xiong, Huazhong Univ. of Science and Technology (China)
Xiong Li, Huazhong Univ. of Science and Technology (China)
Xiongwei Li, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 4984:
Micromachining Technology for Micro-Optics and Nano-Optics
Eric G. Johnson, Editor(s)

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