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Proceedings Paper

Low-loss wideband filters and resonator filters using high-temperature stable high-electromechanical-coupling acoustic surface wave substrates using microfabrication technology
Author(s): Kazuhiko Yamanouchi; Toru Ishii
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Paper Abstract

SiO2/rotated Y-cut, X-propagating LiNbO3 leaky SAW substrates with a large k2(over 0.2) and zero TCF at a small thickness of SiO2 of H/λ=0.2 (H: SiO2 film thickness, λ: (SAW wave-length) compared to those of other substrates and zero propagation attenuation in the case of metalized surface. Theoretical and experimental results for low-loss filters, resonators and resonator filters are described. The low-loss filters using (FEUDT) showed an insertion loss of below 1dB at a center frequency of 400MHz and bandwidth of 20MHz using micro-fabrication technology. Also, the resonator showed wide-band characteristics and resonator filters showed a bandwidth of 89MHz at a center frequency of 500MHz.

Paper Details

Date Published: 24 April 2003
PDF: 6 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.501307
Show Author Affiliations
Kazuhiko Yamanouchi, Tohoku Institute of Technology (Japan)
Toru Ishii, Tohoku Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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