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Proceedings Paper

Measurement of optically effective surfaces by imaging of gratings
Author(s): Marcus Petz; Rainer Tutsch
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Paper Abstract

Due to the increasing use of aspherical optics, there is a demand for innovative measuring methods that allow the flexible testing of a wide variety of optical components. With the measuring method presented in this paper the imaging properties of the optical component under test may be determined by making it part of an imaging system consisting of an electronic camera with lens, a special grid pattern and the object itself. The grid pattern is taken as a reference object whose resulting image recorded by the camera is evaluated in order to obtain the properties of the tested optical component. In favor of a high measurement accuracy phase shifting techniques and photogrammetric methods are used in the course of the evaluation of the reference structure and the characterization of the tested optical surface. Unlike other techniques the presented measuring method does not require particular previous knowledge of the tested component and may be applied to both reflective and refractive optical surfaces. Measuring examples for reflective and refractive components are given, demonstrating the potential of the method.

Paper Details

Date Published: 30 May 2003
PDF: 7 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.500601
Show Author Affiliations
Marcus Petz, Technische Univ. Braunschweig (Germany)
Institut fur Produktionsmesstechnik (Germany)
Rainer Tutsch, Technische Univ. Braunschweig (Germany)
Institut fur Produktionsmesstechnik (Germany)

Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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