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Proceedings Paper

Study of subpixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy
Author(s): Adel Hafiane; Sylvain Petitgrand; Olivier Gigan; Samia Bouchafa; Alain Bosseboeuf
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Paper Abstract

Several optical methods have been developed for the measurement of in-plane vibration of microscopic objects. However most of them need a scattering surface or a specific surface structuring. A low cost method which has not these limitations is optical stroboscopic microscopy combined with image processing by optical flow techniques. Previous works have shown that a nanometric sensitivity can be obtained. In this paper, we investigated several subpixel image processing methods for in-plane vibration measurements of MEMS by this technique. Emphasis was put on whole displacement field measurements and on fast algorithms able to process a large sequence of images without the need of a multi-resolution approach to get local vibration amplitudes. It is notably shown that use of spatiotemporal regularity between images is an efficient way to reduce noise and that a resolution in the 0.01 - 0.03 pixel range can be achieved. Results are applied to in-plane vibration local measurements in two perpendicular directions at video rate as well as to full-field mapping of in-plane vibration mode of electrostatically actuated MEMS devices in SOI technology.

Paper Details

Date Published: 3 October 2003
PDF: 11 pages
Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003); doi: 10.1117/12.500141
Show Author Affiliations
Adel Hafiane, Univ. Paris XI, CNRS (France)
Sylvain Petitgrand, Univ. Paris XI, CNRS (France)
Olivier Gigan, TRONICS Microsystems (France)
Samia Bouchafa, Univ. Paris XI, CNRS (France)
Alain Bosseboeuf, Univ. Paris XI, CNRS (France)

Published in SPIE Proceedings Vol. 5145:
Microsystems Engineering: Metrology and Inspection III
Christophe Gorecki, Editor(s)

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