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Proceedings Paper

Standing-wave interferometer based on partially transparent photodiodes
Author(s): Hans J. Buchner; Eerke Bunte; Viktor Mandryka; Helmut Stiebig; Gerd Jaeger
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Paper Abstract

A novel interferometer concept will be presented which is based on an optical standing wave. This standing wave is scanned by a novel, partially transparent photodetector, which is designed as nip-photodiode and contacted with transparent conductive oxide (TCO). Two transparent photodiodes are integrated to a transparent phase-sensitive sensor. The photodiodes are longitudinally arranged on the optical axis of the standing wave and generate a sine and a cosine signal for the up- and down-counting of the intensity maxima and minima of the standing wave. The layer thickness of the transparent photodiodes has been designed so as to take appropriate coating into account. These measures are demonstrated by a number of experimental results. An incorrect phase relation between the photodiodes will be corrected using the Heydemann algorithm. The non-linearity of the interferometer at a length of <λ/2 will be discussed.

Paper Details

Date Published: 30 May 2003
PDF: 9 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.499902
Show Author Affiliations
Hans J. Buchner, Technische Univ. Ilmenau (Germany)
Eerke Bunte, Forschungszentrum Julich GmbH (Germany)
Viktor Mandryka, Technische Univ. Ilmenau (Germany)
Helmut Stiebig, Forschungszentrum Julich GmbH (Germany)
Gerd Jaeger, Technische Univ. Ilmenau (Germany)

Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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