Share Email Print

Proceedings Paper

Spatial coherence: comparison of interferometric and noninterferometric measurements
Author(s): Bernd Eppich; Guido Mann; Horst Weber
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Coherence properties of real laser beams can be crucial for many applications, e.g. in lithographic processes or for Bragg grating writing. Knowledge of the coherence distribution together with the amplitude and phase distribution allows for a complete beam characterization, which enables the numerical simulation of beam propagation through virtually any relevant optical system. Classical measurement methods of coherence properties are Young’s double hole interferometry and Shear interferometry. But due to their interferometric nature experimental realization of both methods is quite difficult and obtainable accuracies are usually not satisfying. The reconstruction of the Wigner distribution from a couple of measured intensity distributions in the waist region of a beam provides a simple measurement setup delivering fairly accurate results. This is demonstrated by an experimental comparison of these three methods.

Paper Details

Date Published: 25 June 2003
PDF: 12 pages
Proc. SPIE 4969, Laser Resonators and Beam Control VI, (25 June 2003); doi: 10.1117/12.499283
Show Author Affiliations
Bernd Eppich, Technische Univ. Berlin (Germany)
Guido Mann, Technische Univ. Berlin (Germany)
Horst Weber, Technische Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 4969:
Laser Resonators and Beam Control VI
Alexis V. Kudryashov; Alan H. Paxton, Editor(s)

© SPIE. Terms of Use
Back to Top