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Proceedings Paper

Dynamic characterization of passive microstructures (SiO2-Au microcantilevers) under a controlled environment
Author(s): Guillaume Marinier; Eric Joubert; Mohamed Benzohra; Mohamed Ketata
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Paper Abstract

There currently exists many optoelectronic methods of characterization of microstructures. We present here a dynamic method which uses the principle of the optical vibrometer in order to determine the oscillatory modes of microstructures. This measurement makes it possible to go up with the mechanical properties. It is a method without contact, based on the lighting of a microstructure using a laser beam guided by a lensed tapered optical fiber which will be used. Principal evolution of this technique is its miniaturization. It allows to integrate the device within a cryostat, where we will be able to carry out measurements with a control of temperature, pressure and composition of the atmosphere.

Paper Details

Date Published: 24 April 2003
PDF: 8 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498829
Show Author Affiliations
Guillaume Marinier, Univ. de Rouen (France)
Eric Joubert, Univ. de Rouen (France)
Mohamed Benzohra, Univ. de Rouen (France)
Mohamed Ketata, Univ. de Rouen (France)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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