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Proceedings Paper

MEMS-based transmission lines for microwave applications
Author(s): Qun Wu; Jiahui Fu; Xuemai Gu; Huajuan Shi; Jongchul Lee
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Paper Abstract

This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membrane-supported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and coplanar waveguide are discussed. MEMS-based transmission lines are characterized by low propagation loss, wide operation frequency band, low dispersion and high quality factor, in addition, the fabrication is compatible with traditional processing of integrated circuits (IC’s). The emergence of MEMS-based transmission lines provided a solution for miniaturizing microwave system and monolithic microwave integrated circuits.

Paper Details

Date Published: 24 April 2003
PDF: 7 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003);
Show Author Affiliations
Qun Wu, Harbin Institute of Technology (China)
Jiahui Fu, Harbin Institute of Technology (China)
Xuemai Gu, Harbin Institute of Technology (China)
Huajuan Shi, Harbin Institute of Technology (China)
Jongchul Lee, Kwangwoon Univ. (South Korea)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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