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Proceedings Paper

Characteristic of ZnSe aspheric beam homogenizer for CO2 laser
Author(s): Takayuki Hirai; Keiji Fuse; Manabu Shiozaki; Keiji Ebata; Takeshi Okada; Hirokuni Namba
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Paper Abstract

Laser processing is now being used increasingly in the area of electronics, especially, for drilling micro holes in printed circuit. But the intensity distribution of laser beam mainly based on Gaussian is not uniform. Therefore, the demand for uniform intensity distribution is rising rapidly in the field of heat processing. To obtain higher uniformity, attempts must be made to convert non-uniform Gaussian distribution into top-hat shaped uniform intensity distribution for smoothly bending laser beams. In this study the authors propose an aspheric beam homogenizer made from ZnSe that can convert non-uniform Gaussian distribution into top-hat shaped uniform intensity distribution. The ZnSe beam homogenizer consists of two aspheric lenses. First one converts Gaussian profile to uniform irradiation, and second one performs phase matching. The authors design this optical component with a special method based on wave optics. In the design, the authors define the target intensity distribution as the super-Gaussian shaped one instead of completely uniform top-hat shaped one. Compared with the homogenizers of traditional design, the newly designed homogenizer achieved 70% increase in the uniformity of signal intensity even after propagation. The paper reports the measured intensity distribution after propagation from the beam homogenizer with high power CO2 laser.

Paper Details

Date Published: 3 March 2003
PDF: 6 pages
Proc. SPIE 4831, First International Symposium on High-Power Laser Macroprocessing, (3 March 2003); doi: 10.1117/12.497929
Show Author Affiliations
Takayuki Hirai, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Fuse, Sumitomo Electric Industries, Ltd. (Japan)
Manabu Shiozaki, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Ebata, Sumitomo Electric Industries, Ltd. (Japan)
Takeshi Okada, Sumitomo Electric Industries, Ltd. (Japan)
Hirokuni Namba, Sumitomo Electric Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 4831:
First International Symposium on High-Power Laser Macroprocessing
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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