Proceedings PaperLaF3 as a high-index material in VUV
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LaF 3 is presented as a possible high refraction index material for the interference coatings down to wavelength of 145 nm, if well-purified. A material shows up a negative inhomogeneity. The optical parameters of evaporated LaF3 layers are presented. The best mirrors based on LaF3-MgF2 system have a reflectivity up to 99% depending on absorption in layers.