The use of microfabrication techniques allows one to build integrated free-space optical systems which can be useful for applications in optical computing and switching. This paper gives an overview of the fabrication of diffractive micro-optical elements, their integration using the concept of planar optics and their hybrid integration with gallium arsenide chips. Finally, optical clock distribution and space-variant interconnects based on the use of lenslet arrays are considered as examples for applications of integrated micro-optics.

Date Published: 1 November 1991
PDF: 17 pages
Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); doi: 10.1117/12.49391

Published in SPIE Proceedings Vol. 1544:
Miniature and Micro-Optics: Fabrication and System Applications
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)