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Proceedings Paper

Reduced thermal budget processing of high-Tc superconducting thin films and related materials by MOCVD
Author(s): Sanjai Sinha; Rajendra Singh; N. J. Hsu; J. T. C. Ng; P. Chou; Jagdish Narayan
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Paper Abstract

Metal organic chemical vapor deposition (MOCVD) has the potential of emerging as a viable technique to fabricate ribbons, tapes, coated wires, and the deposition of films of high temperature superconductors, and related materials. As a reduced thermal budget processing technique, rapid isothermal processing (RIP) based on incoherent radiation as the source of energy can be usefully coupled to conventional MOCVD. In this paper we report on the deposition and characterization of high quality superconducting thin films of Y-Ba-Cu-O (YBCO) on MgO, SrTiO3, and YSZ substrates by RIP assisted MOCVD. Some preliminary results are also presented for the deposition of BaF2, Y203 and MgO on silicon substrates. It is envisaged that high energy photons from the incoherent light source and the use of a mixture of N2O and 02 as the oxygen source, assist chemical reactions and lower the overall thermal budget for processing of YBCO films.

Paper Details

Date Published: 1 March 1991
PDF: 11 pages
Proc. SPIE 1394, Progress In High-Temperature Superconducting Transistors and Other Devices, (1 March 1991); doi: 10.1117/12.48975
Show Author Affiliations
Sanjai Sinha, Univ. of Oklahoma (United States)
Rajendra Singh, Univ. of Oklahoma (United States)
N. J. Hsu, Univ. of Oklahoma (United States)
J. T. C. Ng, Univ. of Oklahoma (United States)
P. Chou, Univ. of Oklahoma (United States)
Jagdish Narayan, North Carolina State Univ. (United States)

Published in SPIE Proceedings Vol. 1394:
Progress In High-Temperature Superconducting Transistors and Other Devices
Rajendra Singh; Jagdish Narayan; David T. Shaw, Editor(s)

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