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Proceedings Paper

Research sputter cluster tool
Author(s): Peter J. Clarke
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Paper Abstract

The Robotic Cluster Tool was developed for robotic handling and processing of seraiconductor wafers. The processing chanbers are clustered about a central robot which serves the load lock three independent processing chambers and four inspection chautbers joined to the main chamber. The system is under centralized computer control which means the niotion of the robot and associated thin filra processes are all controlled by a conurton computer.

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48955
Show Author Affiliations
Peter J. Clarke, Sputtered Films Inc. (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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