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Proceedings Paper

Self-aligned synthesis of titanium silicide by multipulse excimer laser irradiation
Author(s): Valentin Craciun; Doina Craciun; Ion N. Mihailescu; A. V. Kuzmichov; Vitali I. Konov; S. A. Uglov
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Paper Abstract

We present (report) a new type of titanium suicide self-aligned synthesis based upon excimer laser irradiation. This new process relaxes the requirements for ambient atmosphere control and suppresses the unwanted lateral growth of the silicide.

Paper Details

Date Published: 1 March 1991
PDF: 4 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48953
Show Author Affiliations
Valentin Craciun, Institute of Atomic Physics (Romania)
Doina Craciun, Institute of Atomic Physics (Romania)
Ion N. Mihailescu, Institute of Atomic Physics (Romania)
A. V. Kuzmichov, Institute of General Physics (Russia)
Vitali I. Konov, Institute of General Physics (Russia)
S. A. Uglov, Institute of General Physics (Russia)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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