A survey is given of the field of dry etch simulation. The state-of-the-art of sheath and profile simulation is discussed using the simulator ADEPT as an example. Different approaches for two-dimensional simulation are presented starting with simple rate models as known from SAMPLE. The use of more complex rate models by ADEPT is shown. The integration of surface process models into the two-dimensional profile simulation is demonstrated using an application of the generalized plasma etching model of Zawaideh. A new simulation approach is introduced based on the cell removal algorithm and Monte-Carlo methods. Surface process models are visualized and three-dimensional geometrical effects are demonstrated with this new approach.

Date Published: 1 March 1991
PDF: 12 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48902

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)