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Proceedings Paper

Design considerations of electrostatic forces in microaccelerometers
Author(s): Jingxin Dong; Xiaochun Wu
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Paper Abstract

Micromechanical accelerometers are microscale sensors, whose operating principles and design theories are similar to those of conventional accelerometers. However, surface forces between mechanical structures become more important factors that affect the performance as microstructural size decreases. This paper discusses the effects of the electrostatic forces on the performance of open- and closed- loop micromechanical accelerometers, which are stiffness and damping change, and difference of the transfer function of the system.

Paper Details

Date Published: 24 April 2003
PDF: 9 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003);
Show Author Affiliations
Jingxin Dong, Tsinghua Univ. (China)
Xiaochun Wu, Carnegie Mellon Univ. (United States)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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