Share Email Print

Proceedings Paper

Accuracy limitations in specular-mode optical topography extraction
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Specular-mode spectroscopic ellipsometry (SE) or reflectometry (SR) from periodic gratings have been successfully demonstrated as accurate methods for extracting detailed topography of integrated circuit structures. However, as critical dimensions become very much less than the current minimum measurement wavelengths and as film thicknesses are simultaneously reduced, there are significant questions regarding the long-term usefulness of this method. In this paper, I will attempt to address some major aspects of this problem.

Paper Details

Date Published: 2 June 2003
PDF: 12 pages
Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); doi: 10.1117/12.488484
Show Author Affiliations
Fred Lewis Terry Jr., Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 5038:
Metrology, Inspection, and Process Control for Microlithography XVII
Daniel J. Herr, Editor(s)

© SPIE. Terms of Use
Back to Top