The growing evolution of MEMS devices over the past decade from laboratory R&D environments into volume production settings for consumer use, has required Dimensional Metrology to become an invaluable part of the device fabrication process. In this paper we examine the dimensional metrology requirements for the Inkjet MEMS, and present high precision data obtained at a variety of fabrication stages. The measurement data has been used to guide process control on these structures and ultimately has led to improved device performance.

Date Published: 2 June 2003
PDF: 9 pages
Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); doi: 10.1117/12.487601

Published in SPIE Proceedings Vol. 5038:
Metrology, Inspection, and Process Control for Microlithography XVII
Daniel J. Herr, Editor(s)