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Proceedings Paper

Microbolometer development and production at Indigo Systems
Author(s): William A. Terre; Robert Cannata; Patrick Franklin; Alfredo Gonzalez; Eric Kurth; Hiep Ly; William J. Parrish; Kevin Peters; Tommie Romeo; Robert VanYsseldyk
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Paper Abstract

While microbolometers have been in production for several years, the number of companies producing them is quite small. Indigo Systems has entered into the development and production of VOx based microbolometers, at its Goleta facility. Through the investment of significant capital, Indigo has established a high volume production facility based on the silicon industry model. The 6-inch, cassette-to-cassette, highly automated facility is capable of yielding hundreds of thousands of die per year. Discussed in the paper will be the design and layout of the facility, performance of the devices, as well as yield, trend and throughput data.

Paper Details

Date Published: 10 October 2003
PDF: 9 pages
Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); doi: 10.1117/12.487317
Show Author Affiliations
William A. Terre, Indigo Systems Corp. (United States)
Robert Cannata, Indigo Systems Corp (United States)
Patrick Franklin, Indigo Systems Corp. (United States)
Alfredo Gonzalez, Indigo Systems Corp. (United States)
Eric Kurth, Indigo Systems Corp. (United States)
Hiep Ly, Indigo Systems Corp (United States)
William J. Parrish, Indigo Systems Corp. (United States)
Kevin Peters, Indigo Systems Corp. (United States)
Tommie Romeo, Indigo Systems Corp (United States)
Robert VanYsseldyk, Indigo Systems Corp. (United States)

Published in SPIE Proceedings Vol. 5074:
Infrared Technology and Applications XXIX
Bjorn F. Andresen; Gabor F. Fulop, Editor(s)

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