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Proceedings Paper

Behavior of zinc oxide nanoparticles in pulsed-laser deposition
Author(s): Yoshiki Nakata; Agung Budi Hartanto; Mitsuhisa Kawakami; Tatsuo Okada; Mitsuo Maeda
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Paper Abstract

Crystalline and c-axis oriented zinc oxide (ZnO) films with grain structure were deposited on sapphire substrates by pulsed-laser deposition (PLD) technique. The deposited films had cut off at about 390 nm. Photoluminescence (PL) was observed with excitation at 355 nm by third harmonic wave of Nd:YAG laser. In addition, the behaviors of the nanoparticles condensing in the gas phase of PLD were observed by imaging and spectroscopic methods of ultra-violet Rayleigh scattering (UV-RS) and laser-induced incandescence (LII).

Paper Details

Date Published: 19 February 2003
PDF: 6 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486590
Show Author Affiliations
Yoshiki Nakata, Kyushu Univ. (Japan)
Agung Budi Hartanto, Kyushu Univ. (Japan)
Mitsuhisa Kawakami, Kyushu Univ. (Japan)
Tatsuo Okada, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)

Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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